Modern Semiconductor devices for Integrated Circuit.
By Chenming Calvin Hu
Chapter 1
Visualization of the Silicon Crystal
1.1 (a) Please refer to Figure 1-2. The 8 corner atoms are shared by 8 unit cells and
therefore contribute 1 atom. Similarly, the 6 face atoms are each shared by 2 unit
cells and contribute 3 atoms. And, 4 atoms are located inside the unit cell.
Hence, there are total 8 silicon atoms in each unit cell.
(b) The volume of the unit cell is
Vunit cell 5.43 A3 5.43 108 cm 1.60 1022 cm3 ,
3
and one unit cell contains 8 silicon atoms. The atomic density of silicon is
8 silicon atoms
NSi 5.00 1022 (silicon atoms) cm3 .
Vunit cell
Hence, there are 5.001022 silicon atoms in one cubic centimeter.
(c) In order to find the density of silicon, we need to calculate how heavy an
individual silicon atom is
28.1 g/mole
Mass1 Si atom 4.67 1023g/atom.
6.02 10 23 atoms/mole
Therefore, the density of silicon (Si) in g/cm3 is
ρ Si N Si Mass 1 Si atom 2.33 g / cm 3 .
,Fermi Function
1.2 (a) Assume E = Ef in Equation (1.7.1), f(E) becomes ½. Hence, the probability is ½.
(b) Set E = Ec + kT and Ef = Ec in Equation (1.7.1):
1
f(E) 1 0.27 .
Ec kT Ec /kT
1 e 1 e 1
The probability of finding electrons in states at Ec + kT is 0.27.
, * For Problem 1.2 Part (b), we cannot use approximations such as Equations (1.7.2)
or (1.7.3) since E-Ef is neither much larger than kT nor much smaller than -kT.
(c) f(E) is the probability of a state being filled at E, and 1-f(E) is the probability of a
state being empty at E. Using Equation (1.7.1), we can rewrite the problem as
f(E Ec kT) 1 f(E Ec 3kT)
1 1
1
1 e Ec kT E f 1 e Ec 3kT E f
/kT /kT
where
1 1 eEc 3kT E f /kT 1 eEc 3kT E f /kT
1
1 eEc 3kT E f /kT 1 eEc13kT E f /kT 1 eEc 3kT E f /kT
.
1 e Ec 3kT E f /kT
Now, the equation becomes
1 1
.
Ec kT E f /kT Ec 3kT E f /kT
1 e 1 e
This is true if and only if
Ec kT Ef Ec 3kT E f .
Solving the equation above, we find
E f Ec 2kT .
1.3 (a) Assume E = Ef and T > 0K in Equation (1.7.1). f(E) becomes ½. Hence, the
probability is ½.
(b) f(E) is the probability of a state being filled at E, and 1-f(E) is the probability of a
state being empty at E. Using Equation (1.7.1), we can rewrite the problem as
f(E Ec ) 1 f(E Ev )
1 1
Ec E f /kT 1 Ev E f /kT
1 e 1 e
where
, 1
1 1 eEv E f /kT 1 eEv E f /kT
1
.
1 eEc E f /kT 1 e Ev E f /kT
1 e Ev E f /kT 1 e Ev E f /kT
Now, the equation becomes
1 1
Ec E f /kT Ev E f /kT .
1 e 1 e
This is true if and only if
Ec E f Ev E f .
Solving the equation above, we find
Ec Ev
Ef .
2
(c) The plot of the Fermi-Dirac distribution and the Maxwell-Boltzmann distribution
is shown below.
Probability 1
0.9
0.8 Fermi-Dirac
0.7
Distribution
0.6
0.5 Maxwell-Boltzmann
0.4
Distribution
0.3
0.2
0.1
0
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5
(E-Ef)/kT
The Boltzmann distribution considerably overestimates the Fermi distribution for
small (E-Ef)/kT. If we set (E-Ef)/kT = A in Equations (1.7.1) and (1.7.2), we
have
1
e A 1.10 .
1 eA
Solving for A, we find
1 eA
e e A 10.11 A ln10.11 2.31.
A
1.10
Therefore, the Boltzmann approximation is accurate to within 10% for (E-Ef)/kT
2.31.