Introduction to
Cleanroom Technologies
& safety Protocols
“The success of the manufacture of micro/nanodevices
depends as much on the attention to particles control,
cleaning and gettering as it does on the design features
of a particular product”
,Outline
• Cleanroom definition and applications
• Cleanroom classifications
• Micro-contamination
• Controlled Environment concepts
• Cleanroom practice and protocols
• Safety issues
,Definition of a cleanroom
Dictionary (Collins) definition: clean room (kliːn rʊm )
noun
(industry) an environment, typically used in manufacturing or scientific research, in
which environmental contaminants are kept to an absolute minimum
A cleanroom is a room that is clean. A cleanroom now has a special meaning and
it is defined in the International Organization for Standardization (ISO) standard
14644-1 as:
A room in which the concentration of airborne particles is controlled, and which
is constructed and used in a manner to minimize the introduction, generation, and
retention of particles inside the room and in which other relevant parameters, e.g.
temperature, humidity, and pressure, are controlled as necessary.
Key requirements:
• supply exceptionally large quantities of air filtered through with high efficiency
filters.
• dilute and remove the particles and bacteria dispersed from personnel and
machinery within the room.
• cleanroom is built with materials that do not generate particles
• cleanroom personnel use special clothing that minimizes dispersion of particles
and micro-organisms.
, Historical background
The first recognition of a need to control the environment during a work
operation was in medicine. During the latter part of the 19th century, physicians
learned that microorganisms were responsible for transmission of infection.
“Operating rooms" were established in an effort to control
the spread of infection. The emphasis in the operating room was on sterile
conditions or control of biological contamination.
Cleanroom Technologies
& safety Protocols
“The success of the manufacture of micro/nanodevices
depends as much on the attention to particles control,
cleaning and gettering as it does on the design features
of a particular product”
,Outline
• Cleanroom definition and applications
• Cleanroom classifications
• Micro-contamination
• Controlled Environment concepts
• Cleanroom practice and protocols
• Safety issues
,Definition of a cleanroom
Dictionary (Collins) definition: clean room (kliːn rʊm )
noun
(industry) an environment, typically used in manufacturing or scientific research, in
which environmental contaminants are kept to an absolute minimum
A cleanroom is a room that is clean. A cleanroom now has a special meaning and
it is defined in the International Organization for Standardization (ISO) standard
14644-1 as:
A room in which the concentration of airborne particles is controlled, and which
is constructed and used in a manner to minimize the introduction, generation, and
retention of particles inside the room and in which other relevant parameters, e.g.
temperature, humidity, and pressure, are controlled as necessary.
Key requirements:
• supply exceptionally large quantities of air filtered through with high efficiency
filters.
• dilute and remove the particles and bacteria dispersed from personnel and
machinery within the room.
• cleanroom is built with materials that do not generate particles
• cleanroom personnel use special clothing that minimizes dispersion of particles
and micro-organisms.
, Historical background
The first recognition of a need to control the environment during a work
operation was in medicine. During the latter part of the 19th century, physicians
learned that microorganisms were responsible for transmission of infection.
“Operating rooms" were established in an effort to control
the spread of infection. The emphasis in the operating room was on sterile
conditions or control of biological contamination.
