Microsoft Word -
St
Solutions_Manual_
oi
Revised. Silicon
cn
VLSI Technology:
ur
Fundamentals,
se
Practice and
Modeling 1st
Edition by James D.
Plummer
Luke
[COMPANY NAME] [Company address]
, se
ur
cn
oi
St
, James D. Plummer
Michael D. Deal
Peter B. Griffin
St
oi
cn
ur
se
, Chapter 1 Problems
1.1. Plot the NRTS roadmap data from Table 1.1 (feature size vs. time) on an
expanded scale version of Fig. 1.2. Do all the points lie exactly on a straight
line? If not what reasons can you suggest for any deviations you observe?
Answer:
250
200
150
St
100
oi
50
0
cn
1997 2002 2007 2012
Year
ur
Interestingly, the actual data seems to consist of two slopes, with a steeper slope for
the first 2 years of the roadmap. Apparently the writers of the roadmap are more
confident of the industry's ability to make progress in the short term as opposed to
the long term.
se
1.2. Assuming dopant atoms are uniformly distributed in a silicon crystal, how far
apart are these atoms when the doping concentration is a). 10 15 cm-3, b). 1018
cm-3, c). 5x1020 cm-3.
Answer:
The average distance between the dopant atoms would just be one over the cube
root of the dopant concentration:
x = NA −1/ 3
(
a) x = 1x1015 cm−3 )
−
= 1x10−5 cm = 0.1m = 100nm
b) x = (1x10 )
− 1/3
18 cm−3 = 1x10−6 cm = 0.01m = 10nm
St
Solutions_Manual_
oi
Revised. Silicon
cn
VLSI Technology:
ur
Fundamentals,
se
Practice and
Modeling 1st
Edition by James D.
Plummer
Luke
[COMPANY NAME] [Company address]
, se
ur
cn
oi
St
, James D. Plummer
Michael D. Deal
Peter B. Griffin
St
oi
cn
ur
se
, Chapter 1 Problems
1.1. Plot the NRTS roadmap data from Table 1.1 (feature size vs. time) on an
expanded scale version of Fig. 1.2. Do all the points lie exactly on a straight
line? If not what reasons can you suggest for any deviations you observe?
Answer:
250
200
150
St
100
oi
50
0
cn
1997 2002 2007 2012
Year
ur
Interestingly, the actual data seems to consist of two slopes, with a steeper slope for
the first 2 years of the roadmap. Apparently the writers of the roadmap are more
confident of the industry's ability to make progress in the short term as opposed to
the long term.
se
1.2. Assuming dopant atoms are uniformly distributed in a silicon crystal, how far
apart are these atoms when the doping concentration is a). 10 15 cm-3, b). 1018
cm-3, c). 5x1020 cm-3.
Answer:
The average distance between the dopant atoms would just be one over the cube
root of the dopant concentration:
x = NA −1/ 3
(
a) x = 1x1015 cm−3 )
−
= 1x10−5 cm = 0.1m = 100nm
b) x = (1x10 )
− 1/3
18 cm−3 = 1x10−6 cm = 0.01m = 10nm
