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Summary Micro- and Nano-manufacturing Technology

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This document outlines key methods in micro- and nano-manufacturing technology, including focused ion beam machining, laser processing, additive manufacturing, electro-discharge machining, and ultra-precision cutting. It highlights underlying physical principles, process control, and applications in optics, photonics, and semiconductor devices. Serving as lecture notes, it provides a concise foundation for advanced study and research in micro/nano fabrication.

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Institution
Tianjin University
Course
ECE 301

Content preview

2




Micro/Nano Manufacturing Technolog
Focused ion beam-1: Principle




2025.4.14

,Outline 2



1. Principle
2. FIB imaging
3. FIB sputtering
Bitmap Patterning
Astigmatism Correction
Beam Overlap
Dwell Time
Scan Orientation
Channeling Effect
4. Application

,1. Principle 2




Energy of the ions: several to dozens of keV
Beam size: nanometric to sub-nano scale Why can such a small beam size be realize

, 2




◼ Displacement of atoms and ion deposition in th

◼ Electron emission (an effect realizing imaging)

◼ Sputtering of neutral and ionized substrate ato

◼ Chemical interactions of breaking chemical bonds
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Institution
Tianjin University
Course
ECE 301
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Document information

Uploaded on
September 10, 2025
Number of pages
238
Written in
2024/2025
Type
SUMMARY

Subjects

  • micronano manufacturing
  • focused ion beam fib
  • laser machining
  • additive manufacturing
  • two photon polymerization
  • micro milling
  • photonics ap
  • electro discharge machining edm
  • ultra precision diamond cutting
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