Summary
4CM50 - APPLICATIONS OF DESIGN PRINCIPLES
GS4 - 2026
Overview
Yuja videos overview .............................................................................................................................. 2
Lecture 1: ................................................................................................................................................ 3
1.1 Marc Vermeulen: Design of a 3D Coordinate Measurement Machine......................................... 3
Lecture 2: .............................................................................................................................................. 12
2.1 Kevin Looman: Design of a hybrid reluctance actuator with stiffness compensation for EUV
mirror actuation. .............................................................................................................................. 12
2.2 Dennis Struver: Design of a voice coil actuated active vibration isolator for cryogenic
conditions. ........................................................................................................................................ 19
Lecture 3: .............................................................................................................................................. 24
3.1 Jeffrey van Pinksteren: Novel Mechatronic Architectures for Interventional X-ray Systems...... 24
Lecture 4: .............................................................................................................................................. 32
4.1 Roger Hamelinck: Design of an Adaptive Deformable Mirror with High Actuator Density ........ 32
4.2 Bas Huisman: Design and realization of a fiber tensile tester (incomplete) .............................. 40
Lecture 5: .............................................................................................................................................. 47
5.1 Hans Vermeulen – Passive Damping for High-Tech Systems ...................................................... 47
5.2 Kees Verbaan: Passive Damping for High-Tech Systems (incomplete) ....................................... 53
Lecture 6: .............................................................................................................................................. 55
6.1 Rens Henselmans: Non-contact Measurement System for Free-form Optical Surfaces
(NANOMEFOS) .................................................................................................................................. 55
Lecture 7: .............................................................................................................................................. 66
7.1 Kevin van de Boom: Design of a 3-DoF long stroke system (incomplete) ................................. 66
7.2 Hans Vermeulen: Superconducting magnet plate for planar motor application........................ 69
Youp Dorenbos
1
,Yuja videos overview
Nr. Module Yuja videos
1 Marc Vermeulen: 3D Coordinate measuring machine 2023-GS4: 2025-05-14 – 15:30
2022-05-11
2 Kevin Looman: EUV mirror actuation system 2023-GS4: 2024-05-01 – 13:30
3 Dennis Struver: Cryogenic active vibration isolator 2022-2023: 2023-05-24 – 13:30
4 Jeffrey van Pinxteren: Novel mechatronic architectures 2022-2023: 2023-06-14 – 13:30
for interventional X-ray systems 2021-2022: 2022-05-25 – 13:30
2019-2020: 2020-06-03 – 13:00
5 Roger Hamelinck: Adaptive deformable mirror 2022-2023: 2023-05-24 – 14:30
2021-2022: 2022-06-01 – 13:30
2019-2020: 2020-05-13 – 13:00
6 Bas Huisman: Design and realization of a fiber tensile None
tester
7 Hans Vermeulen/ Kees Verbaan: Passive damping in 2022-2023: 2023-06-07 – 13:30
high tech systems 2021-2022: 2022-05-18 – 13:30
2019-2020: 2020-06-05 – 09:00
8 Rens Henselmans: Non-contact measurement 2022-2023: 2023-05-31 – 13:30
machine for freeform optics 2021-2022: 2020-06-08 – 13:30
9 Kevin van de Boom: Design of a 3-DoF long stroke None
system
10 Hans Vermeulen: Superconducting magnet plate for None
planar motor application
2
,Lecture 1:
1.1 Marc Vermeulen: Design of a 3D Coordinate Measurement Machine
Conventional machines
Conventional 3D coordinate measuring machines use a probe with touch trigger (D = 0,15-0,3 mm
with a typical force of 0,5 mN). Using a force that is too high, that could inflict damage to the object
that is being measured.
The conventional 3D coordinate measuring machines are used for measuring 3D complex shapes.
Error sources are:
• Geometric errors, deflections due to movements
• Final stiffness, frame stiffness gives errors due to bending
• Thermal errors, heating, and cooling of different parts lead to differences in length due to
thermal expansion.
• Abbe error, offset form the measured point to the measuring ruler (is covered later).
Using software compensation, to give the ‘real’ result after the machine has taken all its
measurements.
Figure 1 Overview of different 3D CMM machines.
Concept 1: Excentre 3D measuring machine
Features:
• Tight requirements on the parallelism of the axes
• Bearings in one plane to avoid tilting moments
• High precision bearings determine the machine
accuracy
• Preloaded rollers: nest of springs
Pro: reach every position in 2D space) + 1 translational
joint in the probe.
Con: The bearings for M2 are offset to M1, which will
lead to bending moments and uncertainties. Needs
Figure 2 Excenter 3D measuring machine preloading and can be challenging to reach high accuracy.
3
, Concept 2: Octahedral hexapod
Features:
• Flexible movement: 6 axis control
• Limited number of errors
• Elastic hinges to avoid play and hysteresis
(stroke of ±5°)
• Large size: rod size is 6x the measuring volume
• Tight temperature stability requirements
Pro: 2 rotary joints: 6-axis control to move the
platform in each configuration.
Con: Rods have to be far apart to generate
stiffness, large size as a result. Thermal problems
Figure 3 Hexapod.
are far earlier encountered.
Abbe principle:
“A straightness error causes a
measurement error which is linear
proportional to the offset h between
the probe and the scale.”
Concept 3: Machine concept with intermediate bodies
The scales that are used for measuring, are in line with the measuring probe (the offset is very low).
The bearings for the guides, are far apart to give a high tilting stiffness to the mechanism. The blue
bar is only supported by three bearing guides to avoid over constraining (tilting DOF’s not fixated too
many times).
Figure 15 Concept 3: Machine concept with intermediate bodies.
If left red beam (parallel to x) is not straight, that does not cause a measurement error in the due to
the application of the Abbe principle: if beam is not straight, measuring along the x-axis is not
4
4CM50 - APPLICATIONS OF DESIGN PRINCIPLES
GS4 - 2026
Overview
Yuja videos overview .............................................................................................................................. 2
Lecture 1: ................................................................................................................................................ 3
1.1 Marc Vermeulen: Design of a 3D Coordinate Measurement Machine......................................... 3
Lecture 2: .............................................................................................................................................. 12
2.1 Kevin Looman: Design of a hybrid reluctance actuator with stiffness compensation for EUV
mirror actuation. .............................................................................................................................. 12
2.2 Dennis Struver: Design of a voice coil actuated active vibration isolator for cryogenic
conditions. ........................................................................................................................................ 19
Lecture 3: .............................................................................................................................................. 24
3.1 Jeffrey van Pinksteren: Novel Mechatronic Architectures for Interventional X-ray Systems...... 24
Lecture 4: .............................................................................................................................................. 32
4.1 Roger Hamelinck: Design of an Adaptive Deformable Mirror with High Actuator Density ........ 32
4.2 Bas Huisman: Design and realization of a fiber tensile tester (incomplete) .............................. 40
Lecture 5: .............................................................................................................................................. 47
5.1 Hans Vermeulen – Passive Damping for High-Tech Systems ...................................................... 47
5.2 Kees Verbaan: Passive Damping for High-Tech Systems (incomplete) ....................................... 53
Lecture 6: .............................................................................................................................................. 55
6.1 Rens Henselmans: Non-contact Measurement System for Free-form Optical Surfaces
(NANOMEFOS) .................................................................................................................................. 55
Lecture 7: .............................................................................................................................................. 66
7.1 Kevin van de Boom: Design of a 3-DoF long stroke system (incomplete) ................................. 66
7.2 Hans Vermeulen: Superconducting magnet plate for planar motor application........................ 69
Youp Dorenbos
1
,Yuja videos overview
Nr. Module Yuja videos
1 Marc Vermeulen: 3D Coordinate measuring machine 2023-GS4: 2025-05-14 – 15:30
2022-05-11
2 Kevin Looman: EUV mirror actuation system 2023-GS4: 2024-05-01 – 13:30
3 Dennis Struver: Cryogenic active vibration isolator 2022-2023: 2023-05-24 – 13:30
4 Jeffrey van Pinxteren: Novel mechatronic architectures 2022-2023: 2023-06-14 – 13:30
for interventional X-ray systems 2021-2022: 2022-05-25 – 13:30
2019-2020: 2020-06-03 – 13:00
5 Roger Hamelinck: Adaptive deformable mirror 2022-2023: 2023-05-24 – 14:30
2021-2022: 2022-06-01 – 13:30
2019-2020: 2020-05-13 – 13:00
6 Bas Huisman: Design and realization of a fiber tensile None
tester
7 Hans Vermeulen/ Kees Verbaan: Passive damping in 2022-2023: 2023-06-07 – 13:30
high tech systems 2021-2022: 2022-05-18 – 13:30
2019-2020: 2020-06-05 – 09:00
8 Rens Henselmans: Non-contact measurement 2022-2023: 2023-05-31 – 13:30
machine for freeform optics 2021-2022: 2020-06-08 – 13:30
9 Kevin van de Boom: Design of a 3-DoF long stroke None
system
10 Hans Vermeulen: Superconducting magnet plate for None
planar motor application
2
,Lecture 1:
1.1 Marc Vermeulen: Design of a 3D Coordinate Measurement Machine
Conventional machines
Conventional 3D coordinate measuring machines use a probe with touch trigger (D = 0,15-0,3 mm
with a typical force of 0,5 mN). Using a force that is too high, that could inflict damage to the object
that is being measured.
The conventional 3D coordinate measuring machines are used for measuring 3D complex shapes.
Error sources are:
• Geometric errors, deflections due to movements
• Final stiffness, frame stiffness gives errors due to bending
• Thermal errors, heating, and cooling of different parts lead to differences in length due to
thermal expansion.
• Abbe error, offset form the measured point to the measuring ruler (is covered later).
Using software compensation, to give the ‘real’ result after the machine has taken all its
measurements.
Figure 1 Overview of different 3D CMM machines.
Concept 1: Excentre 3D measuring machine
Features:
• Tight requirements on the parallelism of the axes
• Bearings in one plane to avoid tilting moments
• High precision bearings determine the machine
accuracy
• Preloaded rollers: nest of springs
Pro: reach every position in 2D space) + 1 translational
joint in the probe.
Con: The bearings for M2 are offset to M1, which will
lead to bending moments and uncertainties. Needs
Figure 2 Excenter 3D measuring machine preloading and can be challenging to reach high accuracy.
3
, Concept 2: Octahedral hexapod
Features:
• Flexible movement: 6 axis control
• Limited number of errors
• Elastic hinges to avoid play and hysteresis
(stroke of ±5°)
• Large size: rod size is 6x the measuring volume
• Tight temperature stability requirements
Pro: 2 rotary joints: 6-axis control to move the
platform in each configuration.
Con: Rods have to be far apart to generate
stiffness, large size as a result. Thermal problems
Figure 3 Hexapod.
are far earlier encountered.
Abbe principle:
“A straightness error causes a
measurement error which is linear
proportional to the offset h between
the probe and the scale.”
Concept 3: Machine concept with intermediate bodies
The scales that are used for measuring, are in line with the measuring probe (the offset is very low).
The bearings for the guides, are far apart to give a high tilting stiffness to the mechanism. The blue
bar is only supported by three bearing guides to avoid over constraining (tilting DOF’s not fixated too
many times).
Figure 15 Concept 3: Machine concept with intermediate bodies.
If left red beam (parallel to x) is not straight, that does not cause a measurement error in the due to
the application of the Abbe principle: if beam is not straight, measuring along the x-axis is not
4
