ECE 301

Tianjin University

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Micro- and Nano-manufacturing Technology
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September 2025

2024/2025
This document outlines key methods in micro- and nano-manufacturing technology, including focused ion beam machining, laser processing, additive manufacturing, electro-discharge machining, and ultra-precision cutting. It highlights underlying physical principles, process control, and applications in optics, photonics, and semiconductor devices. Serving as lecture notes, it provides a concise foundation for advanced study and research in micro/nano fabrication.
dicklong
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